Vibration control of sensitive manufacturing facilities

Abstract

As demands increase for reducing feature sizes in computer processors, display units and media, the requirements for controlling vibration levels become more severe and begin to govern structural design. Design guidance is so far limited or non-existent and vibration control exercises are not standardised but case-specific. This paper presents experiences in vibration control of micro-electronics fabrication plants or ‘fabs’ subject to dynamic loading from pedestrians, wind, vehicles and other machinery, the lessons learnt and some suggestions on design.