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dc.contributor.authorDe Silvaa, , G
dc.contributor.authorBurgess, SC
dc.contributor.authorHatano, T
dc.contributor.authorKhan, SG
dc.contributor.authorZhang, K
dc.contributor.authorNguyen, T
dc.contributor.authorHerrmann, G
dc.contributor.authorEdwards, C
dc.contributor.authorMiles, M
dc.date.accessioned2017-06-08T08:21:08Z
dc.date.issued2017-05-10
dc.description.abstractThis paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.en_GB
dc.identifier.citationPublished online 10 May 2017en_GB
dc.identifier.doi10.1016/j.precisioneng.2017.05.005
dc.identifier.urihttp://hdl.handle.net/10871/27854
dc.language.isoenen_GB
dc.publisherElsevier for International Societies for Precision Engineering and Nanotechnologyen_GB
dc.rights© 2017 The Authors. Published by Elsevier Inc. Open Access funded by Engineering and Physical Sciences Research Council. Under a Creative Commons license: https://creativecommons.org/licenses/by/4.0/en_GB
dc.subjectDesign optimisationen_GB
dc.subjectPrototype testingen_GB
dc.subjectFeaen_GB
dc.subjectAtomic force microscopeen_GB
dc.titleOptimisation of a nano-positioning stage for a Transverse Dynamic Force Microscopeen_GB
dc.typeArticleen_GB
dc.date.available2017-06-08T08:21:08Z
dc.identifier.issn0141-6359
dc.descriptionThis is the author accepted manuscript. The final version is available from Elsevier via the DOI in this record.en_GB
dc.identifier.journalPrecision Engineeringen_GB
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/


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© 2017 The Authors. Published by Elsevier Inc. Open Access funded by Engineering and Physical Sciences Research Council. Under a Creative Commons license: https://creativecommons.org/licenses/by/4.0/
Except where otherwise noted, this item's licence is described as © 2017 The Authors. Published by Elsevier Inc. Open Access funded by Engineering and Physical Sciences Research Council. Under a Creative Commons license: https://creativecommons.org/licenses/by/4.0/