Water-based solution processing and wafer-scale integration of all-graphene humidity sensors
Torres Alonso, E; Shin, D-W; Rajan, G; et al.Neves, A; Russo, S; Craciun, MF
Date: 28 May 2019
Journal
Advanced Science
Publisher
Wiley
Publisher DOI
Abstract
One of the main advantages of 2D materials for various applications is that they can be
prepared in form of water-based solutions. The high yield and cost-effectiveness of this
method makes them of great interest for printed electronics, composites, bio and
healthcare technologies. However, once deposited on a substrate, etching ...
One of the main advantages of 2D materials for various applications is that they can be
prepared in form of water-based solutions. The high yield and cost-effectiveness of this
method makes them of great interest for printed electronics, composites, bio and
healthcare technologies. However, once deposited on a substrate, etching away these
solution-processed materials is a difficult task, yet crucial for pattern definition and
thus device fabrication. In particular, the realization of micron-size patterns requires
mesh and paste optimization when screen-printed or solvent-engineering and surface
functionalization when inkjet-printed, both usually involving additional post-deposition
steps. These constrains are holding back the integration of these 2D materials in devices
and applications. In this work, a novel method for the fabrication of micron-size welldefined patterns in water-based 2D materials, is presented, with an extensive
characterization of the films and patterns obtained. The method was ultimately used to
create humidity sensors with performance comparable to that of commercial ones.
These sensor devices were fabricated onto a 4’ silicon and PET wafers to create allgraphene humidity sensors that are flexible, transparent, and compatible with current
CMOS and roll-to-roll workflows.
Engineering
Faculty of Environment, Science and Economy
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