Large Scale Fabrication of Extraordinary Transmission Plasmonic Metasurfaces Employing Ultrafast Lasers
de Galarreta, CR; Casquero, N; Humphreys, E; et al.Bertolotti, J; Solis, J; Wright, CD; Siegel, J
Date: 19 July 2022
Conference paper
Publisher
META Conference
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Abstract
We demonstrate a versatile micro-fabrication technique based on ultrafast direct laser writing, towards
the reliable, large-scale and low-cost fabrication of high-performance extraordinary transmission metasurfaces.
Contrary to well-established lithographic-based fabrication methodologies, our technique enables the single-step
realization ...
We demonstrate a versatile micro-fabrication technique based on ultrafast direct laser writing, towards
the reliable, large-scale and low-cost fabrication of high-performance extraordinary transmission metasurfaces.
Contrary to well-established lithographic-based fabrication methodologies, our technique enables the single-step
realization of the EOT devices of several mm2 in a few minutes. Our fabrication methodology can be carried out
in cleanroom-free environments and without generating chemical residues: conditions which reduce fabrication
costs and are therefore affordable for a vast majority of industrial entities.
Engineering
Faculty of Environment, Science and Economy
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