Large Scale Fabrication of Extraordinary Transmission Plasmonic Metasurfaces Employing Ultrafast Lasers

Abstract

We demonstrate a versatile micro-fabrication technique based on ultrafast direct laser writing, towards the reliable, large-scale and low-cost fabrication of high-performance extraordinary transmission metasurfaces. Contrary to well-established lithographic-based fabrication methodologies, our technique enables the single-step realization of the EOT devices of several mm2 in a few minutes. Our fabrication methodology can be carried out in cleanroom-free environments and without generating chemical residues: conditions which reduce fabrication costs and are therefore affordable for a vast majority of industrial entities.