A simple process for the fabrication of large-area CVD graphene based devices via selective in situ functionalization and patterning
Alexeev, A; Barnes, MD; Nagareddy, VK; et al.Craciun, MF; Wright, CD
Date: 2016
Journal
2D Materials
Publisher
IOP Publishing
Publisher DOI
Abstract
We report a novel approach for the fabrication of micro- and nano-scale graphene devices via the in-situ plasma functionalization and in-situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, ...
We report a novel approach for the fabrication of micro- and nano-scale graphene devices via the in-situ plasma functionalization and in-situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent,
graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.
Engineering
Faculty of Environment, Science and Economy
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