A simple process for the fabrication of large-area CVD graphene based devices via selective in situ functionalization and patterning

Abstract

We report a novel approach for the fabrication of micro- and nano-scale graphene devices via the in-situ plasma functionalization and in-situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent, graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.